关键词: MEMS技术, 矿用倾角传感器, 重力场分解, 温度补偿, 液压支架监测

Abstract: In order to solve the problems of large volume，low precision and weak anti-atrocious en⁃ vironment ability of traditional mine inclination sensor，a mine intrinsically safe inclination sensor is devel⁃ oped based on micro-electro-mechanical system（MEMS）technology.The design adopts a four-layer inte⁃ grated structure of“explosion-proof enclosure-sensitive unit-signal processing-communication power sup⁃ ply”. The high stability MEMS accelerometer is selected as the core sensitive element. Based on the princi⁃ ple of gravity field component decomposition，the inclination calculation model is derived，and the temper⁃ ature compensation algorithm is introduced to suppress the drift of MEMS devices.After completing the hardware selection and software development of the prototype，the performance of the prototype is verified by accuracy calibration，anti-vibration and explosion-proof performance tests.The application results of at⁃ titude monitoring of hydraulic support in 4703 working face of Yangcun Coal Mine show that the static measurement accuracy of the sensor in the laboratory is ±0.01°，the error of underground field application is ≤0.22°，the measurement range is ±60°，and the protection level is IP68，which meets the needs of un⁃ derground field use.

Key words: MEMS technology, mining inclination sensor, decomposition of gravity field, tempera? ture compensation, hydraulic support monitoring